The integration module is ready to be integrated to any fully automated system for
different purpose such as process control feedback.The integration module is being integrated, tested and proved to be the most accurate system by other process control products from our customers.
Specifications:
- Z-axis only.
- Enthernet motion control blocks or PCI motion control card
- 16 probe array (supports more than 16 probes if needed)
- All probes are calibrated to be identical.
- Measure the wafer cross section in just one shot.
- Less than 1 second switching time for each probe.
- Less than 50 msec measuring time for each probe.
- Small foot print to be able to fit into other complete system
By measuring 16 probes at once, it reduces the control feedback time and enables the process control to be integrated in line, on the spot, for every single wafer going through the line. Software support:
GUI application to make test and debug
TFEM Software Development Kit
that provides the device driver and library with clean and easy to use API to control module from within your own software host.
Custom API interface to integrate with customer's existing software.
Network interface control.
The product has been matured and tested by our customer to prove the reliability, accuracy and repeatability of our system running with their system. |
